Inspection: Metrology and SEM
We have an internal Quality Assurance System to maintain the highest of production standards and customer service levels, ensuring the timely delivery of projects to the highest of specifications.
Inspection and Metrology
Here is a summary of the services we provide but they are not exhaustive so please enquire if you have a specific requirement.
OSI
Service: Line width measurement, semi-automatic Resolution: <0.5µm
Tencor P15
Service: Profile measurement, semi-automatic Resolution: 10nm
Nanometrics 210
Service: resist thickness measurement by interferometry Resolution: 10nm
Leica S200
Service: Scanning Electron Microscope (SEM) Resolution: 100nm
Hitachi S4000
Service: SEM with field emission gun and metrology Resolution: <30nm
EBL-40
Service: E-beam metrology and SEM system Resolution: <50nm
Zygo
Service: 3D Optical profiler Resolution: 10nm
AFM
Service: Scanning probe microscope Resolution: 10nm