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Data supplied:  FORMTEXT       FORMTEXT      Metal depositionSputtering  FORMCHECKBOX  Evaporation  FORMCHECKBOX Au:  FORMTEXT      nmAu:  FORMTEXT      nmAl:  FORMTEXT      nmAl:  FORMTEXT      nmAlSi:  FORMTEXT      nm Ag: FORMTEXT      nmCu:  FORMTEXT      nm Cr:  FORMTEXT      nmCr:  FORMTEXT      nmPt:  FORMTEXT      nmNi:  FORMTEXT      nmTi:  FORMTEXT      nmPb:  FORMTEXT      nmTi:  FORMTEXT      nmTiW:  FORMTEXT      nm Comments:  FORMTEXT      PECVD DepositionOxide:  FORMTEXT      nmNitride:  FORMTEXT      nmPatterning (Etch/lift off)CommentsMaterial to be patterned:  FORMTEXT       FORMTEXT      Thickness of material: FORMTEXT       FORMTEXT      Etch  wet  FORMCHECKBOX  dry  FORMCHECKBOX  FORMTEXT      Lift Off  FORMCHECKBOX  FORMTEXT      Dry EtchingCommentsMaterial to be etched:  FORMTEXT       FORMTEXT      Etch depth:  FORMTEXT       FORMTEXT      Minimum feature size:  FORMTEXT       FORMTEXT      Wet EtchingCommentsMaterial to be etched:  FORMTEXT       FORMTEXT      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