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Photo-Lithography

We offer a service for patterning wafers using a step and repeat lithography system. This is capable of resolving to 0.6 microns. Substrate sizes can be 3 - 6 inch and maximum 1mm thick. We also have two contact aligners which can resolve down to 1 um, one can handle 2 - 4 inch substrates and the other can handle 6 and 8 inch substrates.
We have extensive experience of a variety of novel resists:

  • Colour filter material, Micro-lens and thick polyimide for use in display and sensor applications.
  • SU8 for MEMS applications
  • Planarization Materials

Our masks and reticles can be used on a variety of lithography tools including all of our own systems. If you have a query about compatability, please e-mail or phone us to discuss your requirements.

Please visit our mask and reticle page or fill out and e-mail our mask enquiry form

 

 

 

 

 



Karl Suss double sided mask aligner


EVG 680R mask aligner


GCA I-Line 5x Stepper

 

 

   
 
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